Delivery Cases

Optical Components

Ultra-precision Machining and System Assembly & Alignment Technology

Delivered optical components cover the waveband ranging from X-ray to soft X-ray, including Wolter Type-I focusing mirror modules, homogenizing lens assemblies, and supporting test benches.

Optoelectronic Components

Advanced Signal Acquisition and Image Recognition Algorithm Technology

Delivered optoelectronic components include nanometer-level alignment metrology sensors. The energy sensors are capable of capturing photon signals from X-ray to soft X-ray.

Electromechanical Components

Precision Positioning and Cooperative Control Technology

Delivered electromechanical components include automated handling systems, nanometer-scale wafer stages, active and passive vacuum vibration isolators, transition chambers, and other related assemblies.

Environmentally Compatible Components

Ultra-High Clean Vacuum Technology

Delivered environment-related components include vacuum pump sets, high-purity gas cabinets and water cabinets, as well as material outgassing and thermal metering systems, with vacuum pressure better than 1×10⁻⁵ Pa.