This product is a high-precision dedicated metrology instrument for the reflectivity characterization of optical components in the extreme ultraviolet (EUV) band. Specially developed for EUV mirrors, optical coatings, micro-nano optical elements and other applications, it can accurately measure the reflectivity of samples across the full EUV band, including absolute reflectivity, relative reflectivity, angle-dependent reflectivity and other indicators.
This product is equipped with a high-stability EUV light source, precision angle adjustment mechanism, ultra-high vacuum optical system and high-sensitivity detection module, which effectively eliminates stray light and atmospheric interference. The measurement accuracy reaches the industry's advanced level. It is suitable for scientific research fields such as EUV optical component development, optical coating preparation, and micro-nano optical process optimization, providing core reflectivity parameter metrology support for the design and performance verification of EUV optical systems.