This product is a professional metering device for characterizing the outgassing properties of materials and devices in a vacuum environment. It enables accurate detection and quantitative analysis of outgassing species, outgassing rate, and total outgassing volume of solid materials, vacuum components, and optical elements under various vacuum levels and temperature conditions.
This product integrates an ultra-high vacuum chamber, a high-sensitivity mass spectrometry detection module, a precise temperature control system, and a dynamic vacuum monitoring unit, which can capture and analyze outgassing components in real time while providing long-term stability testing capabilities. It is suitable for material screening, device reliability verification, and vacuum process optimization in fields such as aerospace vacuum components, semiconductor manufacturing, extreme ultraviolet (EUV) optical elements, and vacuum coating, providing key data support for leak rate control and long-term stable operation of vacuum systems.